陽極氧化制備鋁磁性膜的研究

Investigation of Anodizing Technology for Aluminium Megnetic Films

摘要: 對陽極氧化技術制備鋁磁性膜進行了實驗研究。用SEM,ESCA,RBS等表面分析手段對Al磁性膜的形貌、大小、厚度以及磁性膜中的元素分布作了分析,并測量了不同工藝條件下磁性膜的矩形比。

Abstract: Anodizing technology for aluminium magnetic films were investigated. The image, size, thickness and the distribution of elements in aluminium magnetic films were analyzed by using SEM, ESCA and RBS. Also, the rectangle rations of the films were measured in our study.