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  • 盧燕平, 張長鑫, 趙海濱, 韓文禮. 鋼表面化學氣相沉積鉭涂層的研究[J]. 工程科學學報, 1984, 6(2): 118-124. DOI: 10.13374/j.issn1001-053x.1984.02.011
    引用本文: 盧燕平, 張長鑫, 趙海濱, 韓文禮. 鋼表面化學氣相沉積鉭涂層的研究[J]. 工程科學學報, 1984, 6(2): 118-124. DOI: 10.13374/j.issn1001-053x.1984.02.011
    Lu Yanping, Zhang Zhangxin, Zhao Haibin, Han Wenli. Studg of Tantalum Coating on Steel by Chemical Vapour Deposition[J]. Chinese Journal of Engineering, 1984, 6(2): 118-124. DOI: 10.13374/j.issn1001-053x.1984.02.011
    Citation: Lu Yanping, Zhang Zhangxin, Zhao Haibin, Han Wenli. Studg of Tantalum Coating on Steel by Chemical Vapour Deposition[J]. Chinese Journal of Engineering, 1984, 6(2): 118-124. DOI: 10.13374/j.issn1001-053x.1984.02.011

    鋼表面化學氣相沉積鉭涂層的研究

    Studg of Tantalum Coating on Steel by Chemical Vapour Deposition

    • 摘要: 本文研究了Ta-Cl2-H2體系在45鋼表面化學氣相沉積鉭涂層工藝,討論了鉭的沉積速度與溫度、五氯化鉭和氫氣壓力之間的關系。本文還扼要介紹了用金相、x射線衍射和電子探針分析等方法測定涂層結構的研究結果。腐蝕試驗結果表明,涂層樣品在37.7%HCl,63%H2SO4介質中具有很高的抗蝕能力,其腐蝕速率比未涂層的可降低2~3個數量級。

       

      Abstract: A tantalum coating process on 45 steel by chemical vapour deposition was studied in the Ta-Cl2-H2 system.Deposit rate of tantalum associated with temperature and partial pressure of TaCl5 and H2 was investigeted.Coating stru-ctures examined by metallogaphy,x-ray diffraction and electroprobe analysis methods ware also described.Corrosion experimental results in 37.7% HCl and 63% H2SO4 Solution show that corrosion rate of the coated samples is 2-3 ord ers lower then that of uncoated samples.

       

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